JASOC 1550

Optical Thin Film Coater

The Main Features

01 Two diffusion pumps combining with a Cryo-trap affords a very hogh efficient exhaust system.

02 Holzer ion source or RF ion source and ion assisted coating, greatly improve the thin film properties and quality.

03 A high stable and reliable EB evaporation source.

04 One RH source (Multiple RH sources are optional).

05 Six sensor crystal thin film deposition controller monitors both thickness and deposition rate of the process.

06 More than 230 PCS of Ø75mm substrates in one batch.

07 Automatic coating process controlling system through the build-in SCS(Smart Coating System)software

Specifications

Model JASOC 1550
Vacuum Chamber SUS304, Ø1550mm x 1550mm(H)
Dome Size Ø430mm * 4
Dome Rotation Speed 10rpm - 30rpm (Adjustable)
Optical Thin Film Thickness Monitoring System Reflection ModeWavelength Range 350nm ~ 1100nm
Transmittion Mode in situWavelength Range 400nm ~ 1700nm
Crystal Thin Film Thickness Monitoring System XTC/3 + 6 Rotary Crystal Sensors
Evaporation Sources 1EB Source; 1 RH Sources (Multiple RH Sources Optional)
Ion Source Hall Ion Source
Exhaust System Rotary + Booster Pumps, 2-22" Diffusion Pumps, Cyro Trap

Performance

IItem Content
Ultimate Pressure ≦7.0 x 10⁻⁵Pa
Pump Down Time(1.3 x 10⁻³Pa) ≦20min
Substrate Temperature ≦150℃

Utility

Item Content
Layout Dimensions 6500(W) x 4500mm(D) x 3100mm(H)
Power Supply ≈75KVA
Cooling Water Flow ≧120L / min
Air Pressure ≧0.5MPa
Gross Weight ≈7000Kg