01High efficiency and environment-friendly automatic exhaust system with Cryo-pump.
02 High stability of 270 degree deflection electron beam source.
03 Large capacity six point rotary RH sources.
04 Optical thin film thickness monitoring system (800-2500nm).
05Six sensor crystal thin film thickness and deposition rate monitoring system.
06 Automatic coating process controlling system through the build-in SCS (Smart Coating System) software.